Back To Schedule
Thursday, September 23 • 1:00pm - 1:30pm
MEMS: MEMS Process and Supply Chain

Sign up or log in to save this to your schedule, view media, leave feedback and see who's attending!

Although early MEMS manufacturing originally leveraged existing semiconductor processes, there are now unique differences in virtually every step of the manufacturing process.  Additionally, the MEMS Market for Sensors is growing rapidly, and the MEMS supply chain is trying to keep up.  Growth areas such as sensors for Smart Cities, automotive applications, smart medical, environmental water and air monitoring, and bio-MEMS are adding complexity to the supply chain.  The MEMS assembly and packaging presents additional complexity, and it is different and more complex than that used in semiconductor ASICs. This presentation will discuss the MEMS manufacturing process, materials, substrates, packaging, and specialized equipment used in the MEMS supply chain.  It will feature slides from SEMI member companies that help to give a clear perspective on the supply chain challenges and some of the solutions.

avatar for Paul Carey, PhD

Paul Carey, PhD

Director, MEMS and Sensors Industry Group (MSIG), Semi
Mr. Carey joined SEMI as the Director of SEMI’s MEMS and Sensors Group early in April 2021 after working at X-Ray imaging backplane supplier, dpiX, in various positions starting in 2003.  He was the process, equipment, and yield manager in their Gen 2.5 Palo Alto glass Fab until... Read More →

Thursday September 23, 2021 1:00pm - 1:30pm PDT
Executive Ballroom A (AE)